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The goal of the project is to develop new machine learning frameworks for high-resolution optical imaging and metrology. You will use the new methods to image complex wafer metrology targets and to...
Work ActivitiesDid you know high-energy electrons can serve as efficient sources of optical excitation of matter? Our group has developed cathodoluminescence (CL) microscopy, in which we use 1-30 keV electrons in a scanning electron microscope (SE...
Work ActivitiesDid you know high-energy electrons can serve as efficient sources of optical excitation of matter? Our group has developed cathodoluminescence microscopy, in which we use 1-30 keV electrons in a scanning electron microscope (SEM) to...
Work ActivitiesThe EUV-emitting laser-produced plasmas are generated from tin targets carefully shaped (hydrodynamically deformed) by a series of laser “pre-pulses”. The ability to shape & control these tin targets is critical for efficient gener...
Work ActivitiesThe goal of the project is to learn more about the possible detrimental effects of electrons in scanning electron microscopy for metrology applications, on materials used in the semiconductor industry. As a PhD student you will use ...
Work ActivitiesThe goal of the project is to learn more about the possible detrimental effects of electrons in scanning electron microscopy for metrology applications, on materials used in the semiconductor industry. As a Postdoctoral Researcher y...
Work ActivitiesIn semiconductor device manufacturing, metrology tools are required for wafer alignment, overlay and device inspection. As devices become more complicated and as stronger light sources are being used to get sufficient signal from sa...
Work ActivitiesSurface reactions live in plasma environmentThis postdoc position connects the two active research fields of surface science and plasma chemistry. The project aims to understand the active state of a surface live during plasma expos...
Work ActivitiesSurface reactions on metal model catalysts in plasma environmentActivation of molecules in a plasma can form the basis for efficient chemical reactions making direct use of electrical energy. The interaction of plasma-activated spec...